Technological possibilities and vacuum systems for deposition of Si:H thin films with embedded nanoparticles

Stuchlík, Jiří - Stuchlíková, The-Ha - Fajgar, Radek - Kupčík, Jaroslav - Remeš, Zdeněk
Technological possibilities and vacuum systems for deposition of Si:H thin films with embedded nanoparticles.
Book of Abstracts of the 28th Joint Seminar Development of Materials Science in Research and Education. Praha: Institute of Physics of the Czech Academy of Sciences, 2018 - (Kožíšek, Z.; Král, R.; Zemenová, P.). s. 53-53. ISBN 978-80-905962-8-3.
[Joint Seminar Development of Materials Science in Research and Education /28./. 03.09.2018-07.09.2018, Pavlov]
Obor OECD: Condensed matter physics (including formerly solid state physics, supercond.)
http://hdl.handle.net/11104/0293962