Počet záznamů: 1
Measurement and modeling of plasma parameters in reactive high-power impulse magnetron sputtering of Ti in Ar/O.sub.2./sub. mixtures
- 1.Čada, Martin - Lundin, D. - Hubička, Zdeněk
Measurement and modeling of plasma parameters in reactive high-power impulse magnetron sputtering of Ti in Ar/O2 mixtures.
Journal of Applied Physics. Roč. 121, č. 17 (2017), s. 1-7, č. článku 171913. ISSN 0021-8979. E-ISSN 1089-7550
Obor OECD: Fluids and plasma physics (including surface physics)
Impakt faktor: 2.176, rok: 2017
http://hdl.handle.net/11104/0281686
Počet záznamů: 1