Deposition of hematite Fe.sub.2./sub.O.sub.3./sub. thin film by DC pulsed magnetron and DC pulsed hollow cathode sputtering system

Hubička, Zdeněk - Kment, Štěpán - Olejníček, Jiří - Čada, Martin - Kubart, T. - Brunclíková, Michaela - Kšírová, Petra - Adámek, Petr - Remeš, Zdeněk
Deposition of hematite Fe₂O₃ thin film by DC pulsed magnetron and DC pulsed hollow cathode sputtering system.
Thin Solid Films. Roč. 549, Dec (2013), s. 184-191. ISSN 0040-6090. E-ISSN 1879-2731
Impakt faktor: 1.867, rok: 2013
http://hdl.handle.net/11104/0229416