Počet záznamů: 1
Multiaxis interferometric system for positioning in nanometrology
- 1.Lazar, Josef - Číp, Ondřej - Čížek, Martin - Hrabina, Jan - Šerý, Mojmír - Klapetek, P.
Multiaxis interferometric system for positioning in nanometrology.
Proceedings of the 9th WSEAS International Conference on Microelectronics, Nanoelectronics, Optoelectronic. Sofia: WSEAS EUROPMENT Press, 2010, s. 92-95. ISBN 978-954-92600-3-8. ISSN 1790-5117.
[WSEAS International Conference on Microelectronics, Nanoelectronics, Optoelectronic /9./. Catania (IT), 29.05.2010-31.10.2010]
http://hdl.handle.net/11104/0191759
Počet záznamů: 1