Počet záznamů: 1
Influence of substrate material on plasma in deposition/sputtering reactor: experiment and computer simulation
- 1.Brzobohatý, Oto - Buršíková, V. - Nečas, D. - Valtr, M. - Trunec, D.
Influence of substrate material on plasma in deposition/sputtering reactor: experiment and computer simulation.
Journal of Physics D-Applied Physics. Roč. 41, č. 3 (2008), 035213:1-8. ISSN 0022-3727. E-ISSN 1361-6463
Impakt faktor: 2.104, rok: 2008
http://hdl.handle.net/11104/0160716
Počet záznamů: 1