Počet záznamů: 1
Application of low-energy backscattered electron detection in the inspection of semiconductor devices technology
- 1.Hutař, Otakar - Oral, Martin - Müllerová, Ilona - Romanovský, Vladimír
Application of low-energy backscattered electron detection in the inspection of semiconductor devices technology.
Jemná mechanika a optika. Roč. 45, č. 10 (2000), s. 271-272. ISSN 0447-6441
http://hdl.handle.net/11104/0100937
Počet záznamů: 1