Počet záznamů: 1
Hiding e-beam exposure fields by deterministic 2D pattering
- 1.Horáček, Miroslav - Knápek, Alexandr - Matějka, Milan - Krátký, Stanislav - Urbánek, M. - Mika, Filip - Kolařík, Vladimír
Hiding e-beam exposure fields by deterministic 2D pattering.
Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. Proceedings of the 16th International Seminar. Brno: Institute of Scientific Instruments The Czech Academy of Sciences, 2018, s. 36-37. ISBN 978-80-87441-23-7.
[Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. Skalský dvůr (CZ), 04.06.2018-08.06.2018]
Obor OECD: Optics (including laser optics and quantum optics)
http://hdl.handle.net/11104/0287595
Počet záznamů: 1