Deposition of hard thin films from HMDSO in atmospheric pressure dielectric barrier discharge

Trunec, D. - Zajíčková, L. - Bursíková, V. - Studnička, F. - Sťahel, P. - Prysiazhnyi, V. - Peřina, Vratislav - Houdková, Jana - Navrátil, Z. - Franta, D.
Deposition of hard thin films from HMDSO in atmospheric pressure dielectric barrier discharge.
Journal of Physics D-Applied Physics. Roč. 43, č. 22 (2010), 225403/1-225403/8. ISSN 0022-3727. E-ISSN 1361-6463
Impakt faktor: 2.105, rok: 2010
http://hdl.handle.net/11104/0189349