Electrical probe diagnostics of the hollow cathode plasma jet system for deposition of TiO.sub.x./sub. thin films

Virostko, Petr - Hubička, Zdeněk - Čada, Martin - Adámek, Petr - Kment, Štěpán - Tichý, M. - Jastrabík, Lubomír
Electrical probe diagnostics of the hollow cathode plasma jet system for deposition of TiO_x thin films.
Contributions to Plasma Physics. Roč. 48, 5-7 (2008), s. 527-533. ISSN 0863-1042. E-ISSN 1521-3986
Impakt faktor: 1.250, rok: 2008
http://hdl.handle.net/11104/0161906