Preparation of Ni-Mn-Ga Micropillars Using Focused Xe-ion Beam Milling for Magnetic Actuation on Microscale

0496285 - FZÚ 2019 RIV DE eng C - Konferenční příspěvek (zahraniční konf.)
Straka, Ladislav - Klimša, Ladislav - Kopeček, Jaromír - Heczko, Oleg - Musiienko, D. - Ullakko, K.
Preparation of Ni-Mn-Ga Micropillars Using Focused Xe-ion Beam Milling for Magnetic Actuation on Microscale.
Proceedings International Conference on New Actuators /16./. Bremen: VDE VERLAG, 2018 - (Borgmann, H.), s. 1-642. ISBN 978-3933339300.
[ACTUATOR 2018 - International Conference on New Actuators /16./. Bremen (DE), 25.06.2018-27.06.2018]
Institucionální podpora: RVO:68378271
Klíčová slova: Micropillars * Actuation
Obor OECD: Condensed matter physics (including formerly solid state physics, supercond.)

Magnetic shape memory alloys are promising candidates for actuation on microscale. We investigate the possibility of using focused Xe-ion (as an alternative to Ga-ion) beam milling (Xe-FIB) for microfabrication on Ni-Mn-Ga magnetic shape memory single crystals. We started with the most basic structures such as micropillars. Xe-FIB working conditions of 30 kV/100 nA results in large curtaining effect thus for micrometre sized structures a two-step milling procedure was used with the final polishing conditions of 30 kV/100 pA. Pillars down to 1 micrometre size were produced preparation of 10 x 10 micrometres square-base pillar for magnetomechanical testing is illustrated in individual steps. By the combination of mechanical testing and optical microscopy we demonstrate that the Xe-FIB milling does not significantly change the ability of martensite twin boundaries to propagate through the fabricated pillars.
Trvalý link: http://hdl.handle.net/11104/0289185