Influence of Different InGaN/(In)GaN Growth Modes on Indium Incorporation and Quality of Layers

0496190 - FZÚ 2019 RIV PL eng A - Abstrakt
Hubáček, Tomáš - Hospodková, Alice - Pangrác, Jiří - Zíková, Markéta - Oswald, Jiří - Kuldová, Karla - Hulicius, Eduard
Influence of Different InGaN/(In)GaN Growth Modes on Indium Incorporation and Quality of Layers.
Proceedings of the International Symposium on Growth of III-Nitrides ISGN-7. University of Warsaw, 2018. s. 155-155.
[International Symposium on Growth of III-Nitrides ISGN-7. 05.08.2018-10.08.2018, Warsaw]
Grant CEP: GA MŠMT(CZ) LO1603; GA ČR GA16-15569S
Institucionální podpora: RVO:68378271
Klíčová slova: InGaN * QW capping * MOVPE
Obor OECD: Condensed matter physics (including formerly solid state physics, supercond.)

In our work we will show how to significantly increase the In content in QWs without lowering the QW growth temperature. We have studied different growth modes of InGaN/(In)GaN heterostructure while the QW growth parameters (temperature, pressure, flow, etc.) were kept constant. We have only changed parameters during the temperature rise to the barrier growth and parameters during the barrier growth. We have introduced a small TMIn flow immediately after the QW growth and observed not only increased concentration of In in the structure (in both, QW and barrier) but also strong increase of the growth rate (confirmed by SIMS and XRD measurements). We explain this phenomenon by suppression of In desorption during the initial phase of the barrier growth. Photoluminescence spectra of samples with different combinations of (In)GaN QW capping and (In)GaN barriers will be shown and discussed. Luminescent homogeneity of these samples was characterized by PL intensity maps.


Trvalý link: http://hdl.handle.net/11104/0289016