Diamond coated LW-SAW sensors-study of diamond thickness effect

0480308 - FZÚ 2018 RIV CH eng C - Konferenční příspěvek (zahraniční konf.)
Drbohlavová, Lucie - Gerbedoen, J.C. - Taylor, Andrew - Talbi, A. - Fekete, Ladislav - Ashcheulov, Petr - Soltani, A. - Bovtun, Viktor - Kempa, Martin - Bartoň, Jan - Cígler, Petr - Mortet, Vincent
Diamond coated LW-SAW sensors-study of diamond thickness effect.
Proceedings (Basel, Switzerland). Vol. 1. Basel: MDPI, 2017, s. 1-4, č. článku 540. E-ISSN 2504-3900.
[Eurosensors 2017. Paris (FR), 03.09.2017-06.09.2017]
Grant CEP: GA MPO FV10312; GA AV ČR(CZ) Fellowship J. E. Purkyně
Grant ostatní: AV ČR(CZ) Fellowship J. E. Purkyně
Program: Fellowship J. E. Purkyně
Institucionální podpora: RVO:68378271 ; RVO:61388963
Klíčová slova: love waves * acoustic sensors * CVD diamond * sensing in liquids
Obor OECD: Condensed matter physics (including formerly solid state physics, supercond.)

This study focuses on the fabrication and characterization of Love wave surface acoustic wave (LW-SAW) sensors with a thin nano-crystalline diamond (NCD) coating with an integrated microfluidics system. The effect of diamond layer thickness on the acoustic wave phase velocity and the sensor’s sensitivity have been investigated experimentally and compared with theoretical simulations. The fabricated sensors have been tested with a several liquids using a home-made microfluidics system.

Trvalý link: http://hdl.handle.net/11104/0276124