Počet záznamů: 1
In situ characterization of local elastic properties of thin shape memory films by surface acoustic waves
- 1.0469096 - ÚT 2017 RIV GB eng J - Článek v odborném periodiku
Grabec, T. - Sedlák, Petr - Stoklasová, Pavla - Thomasová, M. - Shilo, D. - Kabla, M. - Seiner, Hanuš - Landa, Michal
In situ characterization of local elastic properties of thin shape memory films by surface acoustic waves.
Smart Materials and Structures. Roč. 25, č. 12 (2016), č. článku 127002. ISSN 0964-1726. E-ISSN 1361-665X
Grant CEP: GA ČR GA14-15264S
Institucionální podpora: RVO:61388998
Klíčová slova: thin films * shape memory alloys * surface acoustic waves
Kód oboru RIV: BM - Fyzika pevných látek a magnetismus
Impakt faktor: 2.909, rok: 2016
The impulse stimulated thermal scattering experimental technique is used for contactless in situ detection of phase transitions in thin nickel-titanium films deposited on silicon substrates. It is shown that this technique enables the. determination of the. local properties of the film over a fully coated wafer, in particular the thickness of the film and the temperature dependence of the. Young's modulus, and can. thus be. used for monitoring of the spatial distribution of the. functional properties in films prepared by a combinatorial sputtering approach.
Trvalý link: http://hdl.handle.net/11104/0266993
Počet záznamů: 1