Growth rate enhancement and morphology engineering of diamond films by adding CO.sub.2./sub. or N.sub.2./sub. in hydrogen rich gas chemistry

0432636 - FZÚ 2015 RIV US eng J - Článek v odborném periodiku
Ižák, Tibor - Davydova, Marina - Varga, Marián - Potocký, Štěpán - Kromka, Alexander
Growth rate enhancement and morphology engineering of diamond films by adding CO₂ or N₂ in hydrogen rich gas chemistry.
Advanced Science, Engineering and Medicine. Roč. 6, č. 7 (2014), s. 749-755. ISSN 2164-6627
Grant CEP: GA MPO FR-TI2/736; GA ČR GAP205/12/0908; GA ČR(CZ) GP14-16549P
Institucionální podpora: RVO:68378271
Klíčová slova: microwave plasma CVD * diamond growth * nitrogen * carbon dioxide * growth rate * SEM
Kód oboru RIV: BM - Fyzika pevných látek a magnetismus
Trvalý link: http://hdl.handle.net/11104/0237014