Deposition and forming of nanoparticles on the hydrogenated silicon thin films

Stuchlík, J., Fajgar, R., Kupčík, J., Stuchlíková, T.-H., Ledinský, M., Čermák, J., Píč, V., Remeš, Z., Mortet, V., Shklyaev, A.A., Volodin, V. Deposition and forming of nanoparticles on the hydrogenated silicon thin films. In: E-MRS 2017 Spring Meeting and Exhibit. Strasbourg: European Materials Research Society, 2017.