Direct measurements of the ion flux at the substrate in reactive HiPIMS

Čada, M., Lundin, D., Hubička, Z. Direct measurements of the ion flux at the substrate in reactive HiPIMS. In: International Conference on Plasma Surface Engineering. Abstracts. ( PSE 2016 ) /15./. Braunschweig: European Joint Committee on Plasma and Ion Surface Engineering (EJC / PISE), 2016, s. 415-415.