Deposition of oxide nanostructures by nanosecond laser ablation of silicon in an oxygen-containing background gas

Rodionov, A.A., Starinskiy, S.V., Shukhov, Y.G., Bulgakov, A. Deposition of oxide nanostructures by nanosecond laser ablation of silicon in an oxygen-containing background gas. Thermophysics and Aeromechanics. 2021, 28(4), 549-554. ISSN 0869-8643. E-ISSN 1531-8699. Dostupné z: doi: 10.1134/S0869864321040089.