Traceable reference full metrology chain for innovative aspheric and freeform optical surfaces accurate at the nanometer level

Arezki, Y., Su, R., Heikkinen, V., Leprete, F., Psota, P., Bitou, Y., Schober, C., Mehdi-Souzani, C., Alzahrani, B. A. M., Zhang, X., Kondo, Y., Prüss, J., Lédl, V., Anwer, N., Bouazizi, M. L., Leach, R., Nouira, H. Traceable reference full metrology chain for innovative aspheric and freeform optical surfaces accurate at the nanometer level. Sensors. 2021, 21(4), 1-19), 1103. E-ISSN 1424-8220. Dostupné z: doi: 10.3390/s21041103.