Technological possibilities and vacuum systems for deposition of Si:H thin films with embedded nanoparticles

Stuchlík, J., Stuchlíková, T.-H., Fajgar, R., Kupčík, J., Remeš, Z. Technological possibilities and vacuum systems for deposition of Si:H thin films with embedded nanoparticles. In: KOŽÍŠEK, Z., KRÁL, R., ZEMENOVÁ, P., eds. Book of Abstracts of the 28th Joint Seminar Development of Materials Science in Research and Education. Praha: Institute of Physics of the Czech Academy of Sciences, 2018, s. 53-53. ISBN 978-80-905962-8-3.