Počet záznamů: 1
Magnetron sputtered Hf-B-Si-C-N films with controlled electrical conductivity and optical transparency, and with ultrahigh oxidation resistance
- 1.Šímová, V., Vlček, J., Zuzjaková, Š., Houška, J., Shen, Y., Jiang, J. C., Meletis, E. I., Peřina, V. Magnetron sputtered Hf-B-Si-C-N films with controlled electrical conductivity and optical transparency, and with ultrahigh oxidation resistance. Thin Solid Films. 2018, 653(5), 333-340. ISSN 0040-6090. E-ISSN 1879-2731. Dostupné z: doi: 10.1016/j.tsf.2018.03.064
Počet záznamů: 1