Influence of passivation coating on AlGaN/GaN heterostructure during the diamond CVD

Babchenko, O., Vanko, G., Lalinský, T., Huran, J., Haščík, Š., Artemenko, A., Ižák, T., Kromka, A., Vincze, A., Marton, M., Vojs, M. Influence of passivation coating on AlGaN/GaN heterostructure during the diamond CVD. In: PINČÍK, E., ed. Extended Abstract Book of international conference Progress in Applied Surface - SURFINT-SREN V. Bratislava: Comenius University, 2017, s. 13-14. ISBN 978-80-2234411-1.