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The combined technological methods for deposition of Si:H thin films and structures with in situ embedded nanoparticles
- 1.Stuchlík, J., Stuchlíková, T.-H., Remeš, Z., Purkrt, A., Fajgar, R., Koštejn, M., Zhuravlev, K., Kupčík, J., Sveshnikova, L., Galkin, K.N., Galkin, N.G. The combined technological methods for deposition of Si:H thin films and structures with in situ embedded nanoparticles. Advanced Science, Engineering and Medicine. 2015, 7(4), 265-269. ISSN 2164-6627. Dostupné z: doi: 10.1166/asem.2015.1689
Počet záznamů: 1