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6-axis laser interferometry measurement system for a nanometrology standard
- 1.Hrabina, J., Holá, M., Lazar, J., Číp, O. 6-axis laser interferometry measurement system for a nanometrology standard. In: Photomechanics 2015. Book of Abstracts and Program. Delft: Delft University of Technology, 2015, s. 66-69.
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