Počet záznamů: 1
Time-resolved investigation of dual high power impulse magnetronsputtering with closed magnetic field during deposition of Ti–Cu thin films
- 1.Straňák, V., Čada, M., Hubička, Z., Tichý, M., Hippler, R. Time-resolved investigation of dual high power impulse magnetronsputtering with closed magnetic field during deposition of Ti–Cu thin films. Journal of Applied Physics. 2010, 108(4), 043305/1-043305/8. ISSN 0021-8979. E-ISSN 1089-7550. Dostupné z: doi: 10.1063/1.3467001.
Počet záznamů: 1