Počet záznamů: 1
Deposition of SiC thin films using pulsed sputtering of a hollow cathode
- 1.Soukup, R. J., Ianno, N.J., Huguenin-Love, J.L., Lauer, N.T., Hubička, Z. Deposition of SiC thin films using pulsed sputtering of a hollow cathode. Journal of Materials Science and Engineering. 2009, 3(8), 1-4. ISSN 1934-8959.
Počet záznamů: 1