Electrical probe diagnostics of the hollow cathode plasma jet system for deposition of TiO.sub.x./sub. thin films

Virostko, P., Hubička, Z., Čada, M., Adámek, P., Kment, Š., Tichý, M., Jastrabík, L. Electrical probe diagnostics of the hollow cathode plasma jet system for deposition of TiO_x thin films. Contributions to Plasma Physics. 2008, 48(5-7), 527-533. ISSN 0863-1042. E-ISSN 1521-3986. Dostupné z: doi: 10.1002/ctpp.200810085