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Application of low-energy backscattered electron detection in the inspection of semiconductor devices technology
- 1.Hutař, O., Oral, M., Müllerová, I., Romanovský, V. Application of low-energy backscattered electron detection in the inspection of semiconductor devices technology. Jemná mechanika a optika. 2000, 45(10), 271-272. ISSN 0447-6441.
Počet záznamů: 1