FeS.sub.2./sub. thin films deposition by reactive high power magnetron sputtering in Ar+H.sub.2./sub.S gas mixture

HUBIČKA, Z., ČADA, M., KMENT, Š., OLEJNÍČEK, J. FeS₂ thin films deposition by reactive high power magnetron sputtering in Ar+H₂S gas mixture. In: International Conference on Plasma Surface Engineering. Abstracts. ( PSE 2016 ) /15./. Braunschweig: European Joint Committee on Plasma and Ion Surface Engineering (EJC / PISE), 2016, s. 137-137.