Plasma diagnostics in reactive high-power impulse magnetron sputtering system working in Ar + H.sub.2./sub.S gas mixture

HUBIČKA, Z., ČADA, M., KAPRAN, A., OLEJNÍČEK, J., KŠÍROVÁ, P., ZANÁŠKA, M., ADÁMEK, P., TICHÝ, M. Plasma diagnostics in reactive high-power impulse magnetron sputtering system working in Ar + H₂S gas mixture. Coatings. 2020, 10(3), 1-17), 246. E-ISSN 2079-6412. Dostupné z: doi: 10.3390/coatings10030246.