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Structural damage and ion-channelling effects in a single-crystal Si layer modified by medium-heavy ions
- 1.MIKŠOVÁ, R., MACKOVÁ, A., JAGEROVÁ, A., YATSKIV, R. Structural damage and ion-channelling effects in a single-crystal Si layer modified by medium-heavy ions. Surface and Interface Analysis. 2018, 50(11), 1243-1249. ISSN 0142-2421. E-ISSN 1096-9918. Dostupné z: doi: 10.1002/sia.6492
Počet záznamů: 1