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Thermal desorption spectroscopy in prototype furnace for chemical vapor deposition
- 1.PRŮCHA, L., DANIEL, B., PIŇOS, J., MIKMEKOVÁ, E. Thermal desorption spectroscopy in prototype furnace for chemical vapor deposition. In: Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. Proceedings of the 16th International Seminar. Brno: Institute of Scientific Instruments The Czech Academy of Sciences, 2018, s. 60-61. ISBN 978-80-87441-23-7.
Počet záznamů: 1