Fabrication of nanostructured aluminium thin film and in-situ monitoring of the growth

NOVOTNÝ, M., BULÍŘ, J., LANČOK, J., POKORNÝ, P., BODNÁR, M., PIKSOVÁ, K. Fabrication of nanostructured aluminium thin film and in-situ monitoring of the growth. In: MARTIN-PALMA, R.J., JEN, Y.-J., LAKHTAKIA, A., eds. Nanostructured Thin Films III. Bellingham: SPIE, 2010, 7766OU/1-7766OU/8. Proceedings of SPIE, 7766. ISBN 9780819482624. ISSN 0277-786x. Dostupné z: http://dx.doi.org/10.1117/12.860555