A compact, quasi-monochromatic laser-plasma EUV source based on a double-stream gas-puff target at 13.8 nm wavelength

WACHULAK, P.W., BARTNIK, A., FIEDOROWICZ, H., FEIGL, T., JAROCKI, R., KOSTECKI, J., RUDAWSKI, P., SAWICKA, M., SZCZUREK, M., SZCZUREK, A., ZAWADZKI, Z. A compact, quasi-monochromatic laser-plasma EUV source based on a double-stream gas-puff target at 13.8 nm wavelength. Applied Physics B-Lasers and Optics. 2010, 100(3), 461-469. ISSN 0946-2171. E-ISSN 1432-0649. Dostupné z: doi: 10.1007/s00340-010-4076-9