Počet záznamů: 1
Optical emission and mass spectroscopy of plasma processes in reactive DC pulsed magnetron sputtering of aluminium oxide
- 1.NOVOTNÝ, M., BULÍŘ, J., POKORNÝ, P., BOČAN, J., FITL, P., LANČOK, J., MUSIL, J. Optical emission and mass spectroscopy of plasma processes in reactive DC pulsed magnetron sputtering of aluminium oxide. Journal of Optoelectronics and Advanced Materials. 2010, 12(3), 697-700. ISSN 1454-4164. E-ISSN 1841-7132.
Počet záznamů: 1