A study of the ion flux during deposition of titanium thin films by hollow cathode plasma jet

VIROSTKO, P., HUBIČKA, Z., ČADA, M., KMENT, Š., JASTRABÍK, L., TICHÝ, M. A study of the ion flux during deposition of titanium thin films by hollow cathode plasma jet. Journal of Plasma and Fusion Research SERIES. 2009, 8(-), 719-723. ISSN 1883-9630. Dostupné z: http://www.jspf.or.jp/JPFRS/PDF/Vol8/jpfrs2009_08-0719.pdf