Detection of angular distribution of signal electrons in low-voltage SEM

VLČEK, I., LENCOVÁ, B., HORÁČEK, M. Detection of angular distribution of signal electrons in low-voltage SEM. In: EMC 2004 - Proceedings of the 13th European Microscopy Congress. Instrumentation & Methodology. Vol. 1. Liege: Belgian Society for Microscopy, 2004, s. 337-338.