Deposition and forming of nanoparticles on the hydrogenated silicon thin films

STUCHLÍK, Jiří, FAJGAR, Radek, KUPČÍK, Jaroslav, STUCHLÍKOVÁ, The-Ha, LEDINSKÝ, Martin, ČERMÁK, Jan, PÍČ, Vlastimil, REMEŠ, Zdeněk, MORTET, Vincent, SHKLYAEV, A.A., VOLODIN, V. Deposition and forming of nanoparticles on the hydrogenated silicon thin films. In: E-MRS 2017 Spring Meeting and Exhibit. Strasbourg: European Materials Research Society, 2017.