Two-level ablation and damage morphology of Ru films under femtosecond extreme UV irradiation

MILOV, I., ZHAKHOVSKY, V., ILNITSKY, D., MIGDAL, K., KHOKHLOV, V., PETROV, Y., INOGAMOV, N., LIPP, V., MEDVEDEV, Nikita, ZIAJA, B., MEDVEDEV, V., MAKHOTKIN, I.A., LOUIS, E., BIJKERK, F. Two-level ablation and damage morphology of Ru films under femtosecond extreme UV irradiation. Applied Surface Science. 2020, 528(October), 1-18), 146952. ISSN 0169-4332. E-ISSN 1873-5584. Dostupné z: doi: 10.1016/j.apsusc.2020.146952.