Time-resolved optical emission spectroscopy of a unipolar and a bipolar pulsed magnetron sputtering discharge in an argon/oxygen gas mixture with a cobalt target

HIPPLER, Rainer, ČADA, Martin, STRAŇÁK, Vítězslav, HUBIČKA, Zdeněk. Time-resolved optical emission spectroscopy of a unipolar and a bipolar pulsed magnetron sputtering discharge in an argon/oxygen gas mixture with a cobalt target. Plasma Sources Science & Technology. 2019, 28(Nov), 1-13), 115020. ISSN 0963-0252. E-ISSN 1361-6595. Dostupné z: doi: 10.1088/1361-6595/ab54e8.