Automated system for optical inspection of defects in resist coated non-patterned wafer.

KNÁPEK, Alexandr, DROZD, Michal, MATĚJKA, Milan, CHLUMSKÁ, Jana, KRÁL, Stanislav, KOLAŘÍK, Vladimír. Automated system for optical inspection of defects in resist coated non-patterned wafer. In: Fourth International Symposium on Dielectric Materials and Applications (ISyDMA 4). Book of Abstracts. Amman: Jordan University of Science & Technology, 2019.