Počet záznamů: 1
Automated inspection of PMMA coating on non-patterned silicon wafers
- 1.KNÁPEK, Alexandr, DROZD, Michal, MATĚJKA, Milan, CHLUMSKÁ, Jana, KRÁL, Stanislav, KOLAŘÍK, Vladimír. Automated inspection of PMMA coating on non-patterned silicon wafers. In: 11th International Conference on Instrumental Methods of Analysis: Modern Trends and Applications, IMA-2019. Book of abstracts. -: -, 2019, s. 162.
Počet záznamů: 1