Počet záznamů: 1
The combined technological methods for deposition of Si:H thin films and structures with in situ embedded nanoparticles
- 1.STUCHLÍK, Jiří, STUCHLÍKOVÁ, The-Ha, REMEŠ, Zdeněk, PURKRT, Adam, FAJGAR, Radek, KOŠTEJN, Martin, ZHURAVLEV, K., KUPČÍK, Jaroslav, SVESHNIKOVA, L., GALKIN, K.N., GALKIN, N.G. The combined technological methods for deposition of Si:H thin films and structures with in situ embedded nanoparticles. Advanced Science, Engineering and Medicine. 2015, 7(4), 265-269. ISSN 2164-6627. Dostupné z: doi: 10.1166/asem.2015.1689
Počet záznamů: 1