Počet záznamů: 1
Variable shape E-beam writing: proximity effect simulation and correction of binary and relief structures
- 1.URBÁNEK, Michal, MATĚJKA, Milan, KOLAŘÍK, Vladimír, HORÁČEK, Miroslav, KRÁTKÝ, Stanislav, BOK, Jan, CHLUMSKÁ, Jana, MIKŠÍK, P., VAŠINA, J. Variable shape E-beam writing: proximity effect simulation and correction of binary and relief structures. In: 39th International Conference on Micro and Nano Engineering MNE2013. Book of Abstracts. Cambridge: University of Cambridge, 2013, s. 582.
Počet záznamů: 1