In-situ monitoring of the influence of inert gases (Ne, Ar, Kr, Xe) on plasma properties and the growth of magnetron sputtered nanostructured silver thin film

NOVOTNÝ, Michal, BULÍŘ, Jiří, LANČOK, Ján, POKORNÝ, P., PIKSOVÁ, K., FEKETE, Ladislav, MUSIL, Jindřich, ČEKADA, M. In-situ monitoring of the influence of inert gases (Ne, Ar, Kr, Xe) on plasma properties and the growth of magnetron sputtered nanostructured silver thin film. In: LEI, M.K., ed. The 8th Asian - European International Conference on Plasma Surface Engineering. AEPSE 2011. Dalian: AJC PSE, EJC PISE, 2011, 216 O-101.