Education and research at clean room laboratory for silicon device technology at Masaryk University

MIKULÍK, P., HUMLÍČEK, J., HOVORKA, Miloš, KULHA, P., KADLEC, F. Education and research at clean room laboratory for silicon device technology at Masaryk University. In: FEJFAR, A., VETUSHKA, A., eds. Physic and Nanoscale. (Proceedings of the 10th IUVSTA International Summer School ). Praha: IOP AS CR, 2012. ISBN 978-80-260-0619-0.