Počet záznamů: 1
The deposition of 3C-SiC thin films onto the (111) and (110) faces of Si using pulsed sputtering of a hollow cathode
- 1.HUGUENIN-LOVE, J.L., LAUER, N.T., SOUKUP, R. J., IANNO, N.J., KMENT, Štěpán, HUBIČKA, Zdeněk. The deposition of 3C-SiC thin films onto the (111) and (110) faces of Si using pulsed sputtering of a hollow cathode. Materials Science Forum. 2010, 645-648(1-2), 131-134. ISSN 0255-5476. Dostupné z: doi: 10.4028/www.scientific.net/MSF.645-648.131
Počet záznamů: 1