Investigation of the negative ions in Ar/O.sub.2./sub. plasma of magnetron sputtering discharge with Al:Zn target by ion mass spectrometry

POKORNÝ, Petr, MIŠINA, Martin, BULÍŘ, Jiří, LANČOK, Ján, FITL, Přemysl, MUSIL, Jindřich, NOVOTNÝ, Michal. Investigation of the negative ions in Ar/O₂ plasma of magnetron sputtering discharge with Al:Zn target by ion mass spectrometry. Plasma Processes and Polymers. 2011, 8(5), 459-464. ISSN 1612-8850. E-ISSN 1612-8869. Dostupné z: doi: 10.1002/ppap.201000195