Education and research at clean room laboratory for silicon device technology at Masaryk University

MIKULÍK, P., HUMLÍČEK, J., KULHA, P., HOVORKA, Miloš, KADLEC, Filip. Education and research at clean room laboratory for silicon device technology at Masaryk University. In: 12th Scientific and Business Conference SILICON 2010. Rožnov pod Radhoštěm: TECON Scientific s.r.o, 2010, s. 455-456. ISBN 978-80-254-7361-0.