Počet záznamů: 1
Optical emission and mass spectroscopy of plasma processes in reactive DC pulsed magnetron sputtering of aluminium oxide
- 1.NOVOTNÝ, Michal, BULÍŘ, Jiří, POKORNÝ, Petr, BOČAN, Jiří, FITL, Přemysl, LANČOK, Ján, MUSIL, Jindřich. Optical emission and mass spectroscopy of plasma processes in reactive DC pulsed magnetron sputtering of aluminium oxide. Journal of Optoelectronics and Advanced Materials. 2010, 12(3), 697-700. ISSN 1454-4164. E-ISSN 1841-7132.
Počet záznamů: 1