Impact wear resistance of silicon, oxygen and nitrogen containing amorphous carbon films deposited on steel substrates using PECVD

FOŘT, Tomáš, SOBOTA, Jaroslav, GROSSMAN, Jan, BURSÍKOVÁ, V., DUPÁK, Libor, PEŘINA, Vratislav, KLAPETEK, P., BURŠÍK, Jiří. Impact wear resistance of silicon, oxygen and nitrogen containing amorphous carbon films deposited on steel substrates using PECVD. In: DE URQUIJO, J., ed. ICPIG 2009 Conference Proceedings 29th International Conference on Phenomena in Ionized Gases. Cancún: ICPIG2009 Local Organizing Committee, 2009, PB13-13:1-4. ISBN 978-1-61567-694-1. Dostupné z: http://www.icpig2009.unam.mx/pdf/PB13-13.pdf